PROCEDE DE DETECTION D'HUMIDITE DANS UN CIRCUIT INTEGRE ET CIRCUIT INTEGRE ASSOCIE

• Main Authors: HUBERT, Quentin, FORNARA, Pascal, VIDAL-DHO, Matthias
• Format: Patent
• Language: French
• Published: 24.09.2021
• Subjects: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES; PHYSICS; TESTING

Une détection d'humidité éventuelle dans un circuit intégré (CI) est effectuée de façon autonome par le circuit intégré lui-même. Figure pour l'abrégé : Fig 1 Moisture that is possibly present in an integrated circuit is detected autonomously by the integrated circuit itself. An interconnect region of the integrated circuit includes a metal level with a first track and a second track which are separated by a dielectric material. A detection circuit applies a potential difference between the first and second tracks. A current circulating in one of the first and second tracks in response to the potential difference is measured and compared to a threshold. If the current exceeds the threshold, this is indicative of the presence of moisture which renders said dielectric material less insulating.