PROCEDE DE DESOLIDARISATION D'UNE COUCHE UTILE ET COMPOSANT OBTENU PAR CE PROCEDE
Detachment of a useful layer (1), connected initially by a sacrificial layer (2) to a substrate (3), comprises the engraving, at least partially, of the sacrificial layer. Before engraving of the sacrificial layer at least part of the surface (4,5) of at least one of the layers (1, 3) in contact wit...
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Main Authors | , , , |
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Format | Patent |
Language | French |
Published |
21.10.2005
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Edition | 7 |
Subjects | |
Online Access | Get full text |
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Abstract | Detachment of a useful layer (1), connected initially by a sacrificial layer (2) to a substrate (3), comprises the engraving, at least partially, of the sacrificial layer. Before engraving of the sacrificial layer at least part of the surface (4,5) of at least one of the layers (1, 3) in contact with the sacrificial layer are doped and after engraving of the sacrificial layer these surfaces are superficially engraved to augment the rugosity of the doped part of the surface. An independent claim is also included for a component comprising a suspended useful layer, fastened to a substrate and obtained. |
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AbstractList | Detachment of a useful layer (1), connected initially by a sacrificial layer (2) to a substrate (3), comprises the engraving, at least partially, of the sacrificial layer. Before engraving of the sacrificial layer at least part of the surface (4,5) of at least one of the layers (1, 3) in contact with the sacrificial layer are doped and after engraving of the sacrificial layer these surfaces are superficially engraved to augment the rugosity of the doped part of the surface. An independent claim is also included for a component comprising a suspended useful layer, fastened to a substrate and obtained. |
Author | GRANGE HUBERT VIOLLET BOSSON SYLVIE DIEM BERNARD BOREL MICHEL |
Author_xml | – fullname: BOREL MICHEL – fullname: VIOLLET BOSSON SYLVIE – fullname: GRANGE HUBERT – fullname: DIEM BERNARD |
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SubjectTerms | MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY PERFORMING OPERATIONS PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS TRANSPORTING |
Title | PROCEDE DE DESOLIDARISATION D'UNE COUCHE UTILE ET COMPOSANT OBTENU PAR CE PROCEDE |
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