MATERIAL STACK FOR MICROELECTRONIC DEVICE, A MICROELECTRONIC DEVICE THAT INTEGRATES SUCH STACK AND METHOD FOR MANUFACTURING SUCH STACK

The invention relates to a material stack, a microelectronic device that integrates such stack and a method for obtaining such stack.A non-limitative application of the invention relates to Phase-Change Memory device. The material stack (10) for microelectronic device (1) comprises:a. A substrate (1...

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Bibliographic Details
Main Authors Frei, Michel Ranjit, Sabbione, Chiara, Navarro, Gabriele, Tessaire, Magali, Nistor, Lavinia-Elena
Format Patent
LanguageEnglish
French
German
Published 26.06.2024
Subjects
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