MATERIAL STACK FOR MICROELECTRONIC DEVICE, A MICROELECTRONIC DEVICE THAT INTEGRATES SUCH STACK AND METHOD FOR MANUFACTURING SUCH STACK
The invention relates to a material stack, a microelectronic device that integrates such stack and a method for obtaining such stack.A non-limitative application of the invention relates to Phase-Change Memory device. The material stack (10) for microelectronic device (1) comprises:a. A substrate (1...
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Main Authors | , , , , |
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Format | Patent |
Language | English French German |
Published |
26.06.2024
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Subjects | |
Online Access | Get full text |
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