ACTIVE CIRCUIT ELEMENTS ON A MEMBRANE
According to examples, an apparatus may include a substrate having a fluid recirculation channel and a membrane adjacent to the fluid recirculation channel, in which the membrane is portion of the substrate having a smaller thickness than other portions of the substrate. The apparatus may also inclu...
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Main Authors | , |
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Format | Patent |
Language | English French German |
Published |
22.11.2023
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Subjects | |
Online Access | Get full text |
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