ELECTROPLATING CONTROLLER WITH POWER BASED HEAD-ROOM CONTROL

A method of controlling a headroom voltage of a transistor stage of an electroplating system to maintain a target power dissipation across the transistor stage may include maintaining a headroom voltage in the transistor stage for a load in the electroplating system. The method may also include meas...

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Main Author BORJESSON, Mikael R
Format Patent
LanguageEnglish
French
German
Published 19.07.2023
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Abstract A method of controlling a headroom voltage of a transistor stage of an electroplating system to maintain a target power dissipation across the transistor stage may include maintaining a headroom voltage in the transistor stage for a load in the electroplating system. The method may also include measuring an instantaneous power dissipation in the transistor stage and generating a difference output representing a difference between the instantaneous power dissipation in the transistor stage and the target power dissipation in the transistor stage. A voltage across the transistor stage and the load may then be adjusted using the difference output such that the headroom voltage in the transistor stage is adjusted to maintain the target power dissipation in the transistor stage.
AbstractList A method of controlling a headroom voltage of a transistor stage of an electroplating system to maintain a target power dissipation across the transistor stage may include maintaining a headroom voltage in the transistor stage for a load in the electroplating system. The method may also include measuring an instantaneous power dissipation in the transistor stage and generating a difference output representing a difference between the instantaneous power dissipation in the transistor stage and the target power dissipation in the transistor stage. A voltage across the transistor stage and the load may then be adjusted using the difference output such that the headroom voltage in the transistor stage is adjusted to maintain the target power dissipation in the transistor stage.
Author BORJESSON, Mikael R
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DocumentTitleAlternate CONTRÔLEUR D'ÉLECTRODÉPOSITION À CONTRÔLE DE MARGE BASÉ SUR LA PUISSANCE
ELEKTROPLATTIERUNGSSTEUERGERÄT MIT LEISTUNGSBASIERTER KOPFRAUMSTEUERUNG
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RelatedCompanies Applied Materials, Inc
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Snippet A method of controlling a headroom voltage of a transistor stage of an electroplating system to maintain a target power dissipation across the transistor stage...
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SourceType Open Access Repository
SubjectTerms APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC,OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWERSUPPLY SYSTEMS
APPARATUS THEREFOR
CHEMISTRY
CONTROL OR REGULATION THEREOF
CONTROLLING
CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUTPOWER
CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
ELECTRICITY
ELECTROFORMING
ELECTROLYTIC OR ELECTROPHORETIC PROCESSES
GENERATION
METALLURGY
PHYSICS
PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTIONOF COATINGS
REGULATING
SYSTEMS FOR REGULATING ELECTRIC OR MAGNETIC VARIABLES
Title ELECTROPLATING CONTROLLER WITH POWER BASED HEAD-ROOM CONTROL
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