METROLOGY METHOD AND DEVICE

• Main Authors: KONIJNENBERG, Alexander Prasetya, COENE, Willem Marie Julia Marcel, KOOLEN, Armand Eugene Albert, DEN BOEF, Arie Jeffrey, TUKKER, Teunis Willem
• Format: Patent
• Language: English; French; German
• Published: 24.05.2023
• Subjects: CALCULATING; COMPUTING; COUNTING; IMAGE DATA PROCESSING OR GENERATION, IN GENERAL; PHYSICS

Disclosed is a metrology method and associated devices. The method comprises obtaining a first image, said first image being subject to one or more non-isoplanatic aberrations of an optical system used to capture said image; and non-iteratively correcting said first image for the effect of said one...