PARTICLE MEASUREMENT DEVICE

Provided is a particle measurement device in which irradiation light emitted by a light source is expanded by an expander in a shape satisfying the requirements of a diffractive optical element, converted into parallel light, and made to enter the diffractive optical element. The diffractive optical...

Full description

Saved in:
Bibliographic Details
Main Authors KONDO, Kaoru, KONDO, Sota, TABUCHI, Takuya, BANDO, Kazuna
Format Patent
LanguageEnglish
French
German
Published 02.11.2022
Subjects
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
TESTING
Online AccessGet full text

Cover

More Information
Summary:Provided is a particle measurement device in which irradiation light emitted by a light source is expanded by an expander in a shape satisfying the requirements of a diffractive optical element, converted into parallel light, and made to enter the diffractive optical element. The diffractive optical element shapes the irradiation light entering therein into a flat top beam in which the cross section in the focal position thereof has an elongate rectangle shape. The intensity distribution of light can be made substantially uniform in a detection area formed by the shaped irradiation light.
Bibliography:Application Number: EP20200906454