PRODUCT REMOVING METHOD, FLUX REMOVING METHOD, AND PRODUCT REMOVING APPARATUS

A product removing method of introducing an atmospheric gas into a product remover including a corona discharge space to remove a product from the atmospheric gas, the product being generated inside a processing chamber under a low oxygen atmosphere, the method including: mixing the atmospheric gas...

Full description

Saved in:
Bibliographic Details
Main Authors KANDA, Toshiro, MATSUMOTO, Yoshiki, YAMAGUCHI, Naoshi, TAKANO, Yasuyuki
Format Patent
LanguageEnglish
French
German
Published 29.06.2022
Subjects
Online AccessGet full text

Cover

Loading…