HIGH SPEED SYNCHRONIZATION OF PLASMA SOURCE/BIAS POWER DELIVERY

• Main Authors: BURRY, Aaron M, KOZAKEVICH, Felix Leib, GITLIN, Benjamin J, HOLLAND, John, OLDZIEJ, Mariusz, JI, Bing, BHOWMICK, Ranadeep, SMYKA, Jonathan W, MARAKHTANOV, Alexei, RADOMSKI, Aaron T, FISK, Larry J
• Format: Patent
• Language: English; French; German
• Published: 04.05.2022
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS; ELECTRICITY

A radio frequency (RF) generator system includes first and second RF power sources, each RF power source applying a respective RF signal and second RF signal to a load. The first RF signal is applied in accordance with the application of the second RF signal. The application of the first RF signal i...