MULTI-DIMENSIONAL MODEL OF OPTICAL DISPERSION
Methods and systems for estimating values of parameters of interest from optical measurements of a sample early in a production flow based on a multidimensional optical dispersion (MDOD) model are presented herein. An MDOD model describes optical dispersion of materials comprising a structure under...
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Format | Patent |
Language | English French German |
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19.01.2022
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Abstract | Methods and systems for estimating values of parameters of interest from optical measurements of a sample early in a production flow based on a multidimensional optical dispersion (MDOD) model are presented herein. An MDOD model describes optical dispersion of materials comprising a structure under measurement in terms of parameters external to a base optical dispersion model. In some examples, a power law model describes the physical relationship between the external parameters and a parameter of the base optical dispersion model. In some embodiments, one or more external parameters are treated as unknown values that are resolved based on spectral measurement data. In some embodiments, one or more external parameters are treated as known values, and values of base optical dispersion model parameters, one or more external parameters having unknown values, or both, are resolved based on spectral measurement data and the known values of the one or more external parameters. |
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AbstractList | Methods and systems for estimating values of parameters of interest from optical measurements of a sample early in a production flow based on a multidimensional optical dispersion (MDOD) model are presented herein. An MDOD model describes optical dispersion of materials comprising a structure under measurement in terms of parameters external to a base optical dispersion model. In some examples, a power law model describes the physical relationship between the external parameters and a parameter of the base optical dispersion model. In some embodiments, one or more external parameters are treated as unknown values that are resolved based on spectral measurement data. In some embodiments, one or more external parameters are treated as known values, and values of base optical dispersion model parameters, one or more external parameters having unknown values, or both, are resolved based on spectral measurement data and the known values of the one or more external parameters. |
Author | HU, Dawei SUSHCHIK, Mikhail MALKOVA, Natalia YGARTUA, Carlos L |
Author_xml | – fullname: SUSHCHIK, Mikhail – fullname: MALKOVA, Natalia – fullname: HU, Dawei – fullname: YGARTUA, Carlos L |
BookMark | eNrjYmDJy89L5WTQ9Q31CfHUdfH0dfUL9vT3c_RR8PV3cfVR8HdT8A8I8XQGCrh4Bge4BoFkeRhY0xJzilN5oTQ3g4Kba4izh25qQX58anFBYnJqXmpJvGuAsaWxhbmZuaOhMRFKAHSuJw0 |
ContentType | Patent |
DBID | EVB |
DatabaseName | esp@cenet |
DatabaseTitleList | |
Database_xml | – sequence: 1 dbid: EVB name: esp@cenet url: http://worldwide.espacenet.com/singleLineSearch?locale=en_EP sourceTypes: Open Access Repository |
DeliveryMethod | fulltext_linktorsrc |
Discipline | Medicine Chemistry Sciences Physics |
DocumentTitleAlternate | MEHRDIMENSIONALES MODELL EINER OPTISCHEN DISPERSION MODÈLE MULTIDIMENSIONNEL DE DISPERSION OPTIQUE |
ExternalDocumentID | EP3938767A1 |
GroupedDBID | EVB |
ID | FETCH-epo_espacenet_EP3938767A13 |
IEDL.DBID | EVB |
IngestDate | Fri Jul 19 13:01:11 EDT 2024 |
IsOpenAccess | true |
IsPeerReviewed | false |
IsScholarly | false |
Language | English French German |
LinkModel | DirectLink |
MergedId | FETCHMERGED-epo_espacenet_EP3938767A13 |
Notes | Application Number: EP20200773970 |
OpenAccessLink | https://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20220119&DB=EPODOC&CC=EP&NR=3938767A1 |
ParticipantIDs | epo_espacenet_EP3938767A1 |
PublicationCentury | 2000 |
PublicationDate | 20220119 |
PublicationDateYYYYMMDD | 2022-01-19 |
PublicationDate_xml | – month: 01 year: 2022 text: 20220119 day: 19 |
PublicationDecade | 2020 |
PublicationYear | 2022 |
RelatedCompanies | KLA Corporation |
RelatedCompanies_xml | – name: KLA Corporation |
Score | 3.3828807 |
Snippet | Methods and systems for estimating values of parameters of interest from optical measurements of a sample early in a production flow based on a... |
SourceID | epo |
SourceType | Open Access Repository |
SubjectTerms | BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING MEASURING ELECTRIC VARIABLES MEASURING MAGNETIC VARIABLES PHYSICS SEMICONDUCTOR DEVICES TESTING |
Title | MULTI-DIMENSIONAL MODEL OF OPTICAL DISPERSION |
URI | https://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20220119&DB=EPODOC&locale=&CC=EP&NR=3938767A1 |
hasFullText | 1 |
inHoldings | 1 |
isFullTextHit | |
isPrint | |
link | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwfV1La8MwDBale962bGPdixxGbmakeS2HMNbYoR3Ngy4dvZU4c6CXtCwZ-_uTTdrtst2MBMYWfJYsS58B7r0hejnuVMRxC4dI9jviF7wgwhbc84UnhHoxjRN3PLdfFs6iB6ttL4ziCf1S5IiIqBLx3qrzevOTxKKqtrJ54CsUrZ-iPKBGdzseSnfmG3QUsCylaWiEIY6MZBZYvoW4957xorQno2hJs8_eRrIpZfPbo0QnsJ_hZHV7Cj1Ra3AUbj9e0-Aw7t67NThQBZplg8IOhM0ZkHg-zSeETmKWvCoqWz1OKZvqaaSnWS4JDnRZFMJmUnsOesTycExwBcvdbpcs263VuoB-va7FJei8fK8wuhKWW1a2h2Z8xNDCMi2zsKthxcUABn9Oc_WP7hqOpdlkUsH0b6DffnyKW3SzLb9TBvoG9N19Fw |
link.rule.ids | 230,309,786,891,25594,76903 |
linkProvider | European Patent Office |
linkToHtml | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwfV1LT8MwDLam8Rg3KCDGswfUW4T6pocJsT7UQV8aHdptarpU2qWbaBF_HyfqBhe4RY5kJZYc54vtLwD3toZRjpoVMa3CJJz9jjgFLQgzGLUdZjMmMqZxYoUz42Vuznuw2vbCCJ7QL0GOiB5Vor-34rze_DxieaK2snmgKxStn4J85CkdOtZ4OHMUbzzys9RLXcV1caQk05Hu6Oj39jMCpT0bEaFASu9j3pSy-R1RgmPYz1BZ3Z5Aj9USDNztx2sSHMZdvluCA1GgWTYo7JywOQUSz6J8QrxJ7CdvgspWjlPPj-Q0kNMs5wQHMi8K8ad89gzkwM_dkOAKFrvdLvxst1b9HPr1umYXINNyWeHtiulWWRk2mvERrxa6qquFUWkVZUMY_qnm8p-5OxiEeRwtoknyegVH3IT8gUF1rqHffnyyGwy5Lb0VxvoG8xuAAQ |
openUrl | ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Apatent&rft.title=MULTI-DIMENSIONAL+MODEL+OF+OPTICAL+DISPERSION&rft.inventor=SUSHCHIK%2C+Mikhail&rft.inventor=MALKOVA%2C+Natalia&rft.inventor=HU%2C+Dawei&rft.inventor=YGARTUA%2C+Carlos+L&rft.date=2022-01-19&rft.externalDBID=A1&rft.externalDocID=EP3938767A1 |