AUTOMATED AND ROBUST METHOD FOR RECORDING NM-RESOLUTION 3D IMAGE DATA FROM SERIAL ULTRA-SECTIONS OF LIFE-SCIENCES SAMPLES WITH ELECTRON MICROSCOPES

Methods of aligning specimen images of specimen sections situated on a substrate include obtaining an optical or SEM image of the substrate and locating and aligning optical or SEM images of each specimen section. The specimen sections are then imaged with an SEM to obtain preview images, and a regi...

Full description

Saved in:
Bibliographic Details
Main Authors Levien, Cody, Franke, Tilman, Phelippeau, Harold
Format Patent
LanguageEnglish
French
German
Published 30.12.2020
Subjects
CALCULATING
COMPUTING
COUNTING
PHYSICS
Online AccessGet full text

Cover

More Information
Summary:Methods of aligning specimen images of specimen sections situated on a substrate include obtaining an optical or SEM image of the substrate and locating and aligning optical or SEM images of each specimen section. The specimen sections are then imaged with an SEM to obtain preview images, and a region of interest (ROI) in at least one of the preview images is selected. The preview images are processed so that at least portions of the preview images proximate the ROI are aligned. Based on the alignment of the preview images, final SEM image of selected specimen sections are obtained so that a set of images aligned in three dimensions is available. Image alignment can use cross-correlation with a fixed or variable reference that can be updated as specimen section images are processed.
Bibliography:Application Number: EP20200182414