WAVEFRONT MEASUREMENT DEVICE AND WAVEFRONT MEASUREMENT SYSTEM

• Main Authors: YANAGISAWA, Takayuki, ITAKURA, Shigetaka, ANADA, Takayasu, SUZUKI, Masataka
• Format: Patent
• Language: English; French; German
• Published: 06.01.2021
• Subjects: COLORIMETRY; MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT,POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED,VISIBLE OR ULTRA-VIOLET LIGHT; MEASURING; PHYSICS; RADIATION PYROMETRY; TESTING; TESTING STATIC OR DYNAMIC BALANCE OF MACHINES ORSTRUCTURES; TESTING STRUCTURES OR APPARATUS NOT OTHERWISE PROVIDED FOR

The wavefront measurement device performs: generating a first pupil function at a reference wavelength based on input data of a wavefront aberration; calculating a first image plane amplitude at a reference wavelength based on the first pupil function; generating a second pupil function at a multi-w...