PULSED, BIDIRECTIONAL RADIO FREQUENCY SOURCE/LOAD

• Main Authors: HARRINGTON, Matthew G, RUGHOONUNDON, Amish, BURRY, Aaron M, REINHARDT, Ross, FISK, II, Larry J, RADOMSKI, Aaron T, KLEIN, Jesse N, LUU, Ky
• Format: Patent
• Language: English; French; German
• Published: 05.07.2023
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS; ELECTRICITY

A radio frequency power system includes a master RF generator and an auxiliary RF generator, wherein each generator outputs a respective RF signal. The master RF generator also outputs a RF control signal to the auxiliary RF generator, and the RF signal output by the auxiliary RF generator varies in...