ACOUSTIC MICROELECTRONIC DEVICE
An acoustic microelectronic device includes a support, a set of at least one membrane suspended on a face of the support above a cavity by an anchoring zone, and at least one acoustic insulation trench arranged adjacent to the membrane. The device includes at least one bridge connecting the portions...
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Main Authors | , , |
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Format | Patent |
Language | English French German |
Published |
23.10.2019
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Subjects | |
Online Access | Get full text |
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