ACOUSTIC MICROELECTRONIC DEVICE
An acoustic microelectronic device includes a support, a set of at least one membrane suspended on a face of the support above a cavity by an anchoring zone, and at least one acoustic insulation trench arranged adjacent to the membrane. The device includes at least one bridge connecting the portions...
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Main Authors | , , |
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Format | Patent |
Language | English French German |
Published |
23.10.2019
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Subjects | |
Online Access | Get full text |
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Abstract | An acoustic microelectronic device includes a support, a set of at least one membrane suspended on a face of the support above a cavity by an anchoring zone, and at least one acoustic insulation trench arranged adjacent to the membrane. The device includes at least one bridge connecting the portions of two opposite edges of the trench and located overhanging at least one zone of the trench so as to form, in the zone of the trench, an acoustic insulation box below the bridge. |
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AbstractList | An acoustic microelectronic device includes a support, a set of at least one membrane suspended on a face of the support above a cavity by an anchoring zone, and at least one acoustic insulation trench arranged adjacent to the membrane. The device includes at least one bridge connecting the portions of two opposite edges of the trench and located overhanging at least one zone of the trench so as to form, in the zone of the trench, an acoustic insulation box below the bridge. |
Author | COUTIER, Caroline FANGET, Stéphane ROBERT, Philippe |
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Discipline | Medicine Chemistry Sciences |
DocumentTitleAlternate | DISPOSITIF MICROÉLECTRONIQUE ACOUSTIQUE AKUSTISCHE ,MIKROELEKTRONISCHE VORRICHTUNG |
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Notes | Application Number: EP20170808962 |
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Snippet | An acoustic microelectronic device includes a support, a set of at least one membrane suspended on a face of the support above a cavity by an anchoring zone,... |
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SubjectTerms | DEAF-AID SETS ELECTRIC COMMUNICATION TECHNIQUE ELECTRICITY FOR PERFORMING MECHANICAL WORK IN GENERAL GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKEACOUSTIC ELECTROMECHANICAL TRANSDUCERS METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICALVIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY PERFORMING OPERATIONS PUBLIC ADDRESS SYSTEMS TRANSPORTING |
Title | ACOUSTIC MICROELECTRONIC DEVICE |
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