ACOUSTIC MICROELECTRONIC DEVICE

An acoustic microelectronic device includes a support, a set of at least one membrane suspended on a face of the support above a cavity by an anchoring zone, and at least one acoustic insulation trench arranged adjacent to the membrane. The device includes at least one bridge connecting the portions...

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Main Authors FANGET, Stéphane, COUTIER, Caroline, ROBERT, Philippe
Format Patent
LanguageEnglish
French
German
Published 23.10.2019
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Abstract An acoustic microelectronic device includes a support, a set of at least one membrane suspended on a face of the support above a cavity by an anchoring zone, and at least one acoustic insulation trench arranged adjacent to the membrane. The device includes at least one bridge connecting the portions of two opposite edges of the trench and located overhanging at least one zone of the trench so as to form, in the zone of the trench, an acoustic insulation box below the bridge.
AbstractList An acoustic microelectronic device includes a support, a set of at least one membrane suspended on a face of the support above a cavity by an anchoring zone, and at least one acoustic insulation trench arranged adjacent to the membrane. The device includes at least one bridge connecting the portions of two opposite edges of the trench and located overhanging at least one zone of the trench so as to form, in the zone of the trench, an acoustic insulation box below the bridge.
Author COUTIER, Caroline
FANGET, Stéphane
ROBERT, Philippe
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DocumentTitleAlternate DISPOSITIF MICROÉLECTRONIQUE ACOUSTIQUE
AKUSTISCHE ,MIKROELEKTRONISCHE VORRICHTUNG
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Snippet An acoustic microelectronic device includes a support, a set of at least one membrane suspended on a face of the support above a cavity by an anchoring zone,...
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SubjectTerms DEAF-AID SETS
ELECTRIC COMMUNICATION TECHNIQUE
ELECTRICITY
FOR PERFORMING MECHANICAL WORK IN GENERAL
GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKEACOUSTIC ELECTROMECHANICAL TRANSDUCERS
METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICALVIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY
PERFORMING OPERATIONS
PUBLIC ADDRESS SYSTEMS
TRANSPORTING
Title ACOUSTIC MICROELECTRONIC DEVICE
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