METHOD FOR HYDROLYZING CHLOROSILANE POLYMERS
This disclosure is to make it possible to easily stabilize a chlorosilane polymer while preventing a solid chlorosilane polymer from being generated. Disclosed is a method for stabilizing a chlorosilane polymer generated secondarily in a step of a chemical vapor deposition method using chlorosilane-...
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| Main Authors | , , , , |
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| Format | Patent |
| Language | English French German |
| Published |
20.04.2022
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| Subjects | |
| Online Access | Get full text |
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| Abstract | This disclosure is to make it possible to easily stabilize a chlorosilane polymer while preventing a solid chlorosilane polymer from being generated. Disclosed is a method for stabilizing a chlorosilane polymer generated secondarily in a step of a chemical vapor deposition method using chlorosilane-based gas, the method including: a step (S11) of bringing alcohol into contact with the chlorosilane polymer, degrading the chlorosilane polymer to alkoxide, hydrogen chloride and hydrogen, and diluting the degraded alkoxide with the alcohol; and a step (S12) of performing hydrolysis for the alkoxide. |
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| AbstractList | This disclosure is to make it possible to easily stabilize a chlorosilane polymer while preventing a solid chlorosilane polymer from being generated. Disclosed is a method for stabilizing a chlorosilane polymer generated secondarily in a step of a chemical vapor deposition method using chlorosilane-based gas, the method including: a step (S11) of bringing alcohol into contact with the chlorosilane polymer, degrading the chlorosilane polymer to alkoxide, hydrogen chloride and hydrogen, and diluting the degraded alkoxide with the alcohol; and a step (S12) of performing hydrolysis for the alkoxide. |
| Author | OOTSUKA, Yuuta KUBOTA, Wataru ISHIZAKI, Masato AKAZAKI, Kozue TANAKA, Yasutomo |
| Author_xml | – fullname: AKAZAKI, Kozue – fullname: TANAKA, Yasutomo – fullname: ISHIZAKI, Masato – fullname: OOTSUKA, Yuuta – fullname: KUBOTA, Wataru |
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| DocumentTitleAlternate | VERFAHREN ZUR HYDROLYSE VON CHLOROSILANPOLYMEREN MÉTHODE DE HYDROLYSE DE POLYMÈRE DE CHLOROSILANE |
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| Notes | Application Number: EP20170872766 |
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| RelatedCompanies | IHI Corporation |
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| Snippet | This disclosure is to make it possible to easily stabilize a chlorosilane polymer while preventing a solid chlorosilane polymer from being generated. Disclosed... |
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| SubjectTerms | CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL COMPOUNDS THEREOF DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL INORGANIC CHEMISTRY METALLURGY NON-METALLIC ELEMENTS SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION |
| Title | METHOD FOR HYDROLYZING CHLOROSILANE POLYMERS |
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