DAMPING SYSTEM FOR A MOBILE MASS OF A MEMS DEVICE

The invention relates to a damping system for a mobile mass (2) of a MEMS device (1), the system being capable of preventing direct contact between the mass (2) and a surface element (3) of the MEMS device (1), the damping system comprising: a mechanical bumper (4) positioned between the mass (2) an...

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Bibliographic Details
Main Author LEHEE, Guillaume, Jérôme, François
Format Patent
LanguageEnglish
French
German
Published 25.09.2019
Subjects
MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES
MICROSTRUCTURAL TECHNOLOGY
PERFORMING OPERATIONS
TRANSPORTING
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