ELECTROSTATICALLY ACTUATED DEVICE

The present invention relates to an electrostatically actuated device comprising at least first chamber, an electrode chamber comprising a deformable electrode. The deformable electrode is disposed in the electrode chamber such as to form a first electrode chamber and a second electrode chamber.

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Bibliographic Details
Main Author BERGE, Bruno
Format Patent
LanguageEnglish
French
German
Published 10.07.2019
Subjects
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Summary:The present invention relates to an electrostatically actuated device comprising at least first chamber, an electrode chamber comprising a deformable electrode. The deformable electrode is disposed in the electrode chamber such as to form a first electrode chamber and a second electrode chamber.
Bibliography:Application Number: EP20170765366