PHOSPHOR SCREEN FOR MEMS IMAGE INTENSIFIERS

• Main Authors: Chilcott, Dan, Smith, Arlynn W
• Format: Patent
• Language: English; French; German
• Published: 04.10.2023
• Subjects: BASIC ELECTRIC ELEMENTS; DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS; ELECTRICITY; FREQUENCY-CHANGING; GAMMA RAY OR X-RAY MICROSCOPES; IRRADIATION DEVICES; NON-LINEAR OPTICS; NUCLEAR ENGINEERING; NUCLEAR PHYSICS; OPTICAL ANALOGUE/DIGITAL CONVERTERS; OPTICAL LOGIC ELEMENTS; OPTICS; PHYSICS; TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOTOTHERWISE PROVIDED FOR; TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF

A phosphor screen for a Micro-Electro-Mechanical-Systems (MEMS) image intensifier includes a wafer structure, a lattice of interior walls, a thin film phosphor layer, and a reflective metal layer. The wafer structure has a naturally opaque top layer and an active area defined within the naturally opaque top layer. The lattice of interior walls is formed, within the active area, from the naturally opaque top layer. The thin film phosphor layer is disposed in the active area, between the lattice of interior walls. The reflective metal layer that is disposed atop the thin film phosphor layer. In at least some instances, the thin film phosphor layer is a non-particle phosphor layer.