MECHANICAL RESONATOR DEVICE

A mechanical resonator device. The resonator device includes a resonator element made of an elastic material under tensile stress and adapted for sustaining at least one oscillation mode; and a clamping structure supporting the resonator element. The clamping structure has a phononic density of stat...

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Bibliographic Details
Main Authors TSATURYAN, Yeghishe, POLZIK, Eugene Simon, SCHLIESSER, Albert, BARG, Andreas
Format Patent
LanguageEnglish
French
German
Published 05.06.2019
Subjects
BASIC ELECTRONIC CIRCUITRY
ELECTRICITY
IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC ORINFRASONIC WAVES
MEASURING
PHYSICS
RESONATORS
TESTING
WEIGHING
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Summary:A mechanical resonator device. The resonator device includes a resonator element made of an elastic material under tensile stress and adapted for sustaining at least one oscillation mode; and a clamping structure supporting the resonator element. The clamping structure has a phononic density of states exhibiting a bandgap or quasi-bandgap such that elastic waves of at least one polarisation and/or frequency are not allowed to propagate through the clamping structure. The resonator element and the clamping structure are configured to match with a soft-clamping condition that elastic waves of polarisation and/or frequency corresponding to the at least one oscillation mode of the resonator penetrate evanescently into the clamping structure in a manner such as to minimize bending throughout the entire resonator device. Thereby, bending related loss may be minimized and the Q-factor of the mechanical resonator may be maximized.
Bibliography:Application Number: EP20170754634