MANUFACTURING METHOD OF A SENSOR DEVICE AND CORRESPONDING SENSOR DEVICE

• Main Authors: LASITER, Jon, SHENOY, Ravindra, KIDWELL JR., Donald William
• Format: Patent
• Language: English; French; German
• Published: 04.12.2019
• Subjects: ACOUSTICS; ACOUSTICS NOT OTHERWISE PROVIDED FOR; DIAGNOSIS; ELECTRICITY; FOR PERFORMING MECHANICAL WORK IN GENERAL; GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL; HUMAN NECESSITIES; HYGIENE; IDENTIFICATION; MEDICAL OR VETERINARY SCIENCE; METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICALVIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING,NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; MUSICAL INSTRUMENTS; PERFORMING OPERATIONS; PHYSICS; SOUND-PRODUCING DEVICES; SURGERY; TRANSPORTING

Embodiments of a sensor device and methods for manufacturing the same are disclosed. In one embodiment, a sensor device comprises a piezoelectric micromechanical ultrasonic transducer (PMUT) array configured to transmit and receive ultrasonic signals, where the PMUT array comprises a plurality of PMUTs and the PMUT array is flexible, one or more integrated circuits configured to process the ultrasonic signals, a battery configured to provide power to the PMUT array and the one or more integrated circuits, a coupling material configured to hold the PMUT array, the one or more integrated circuits, and the battery, and a capsule configured to seal the PMUT array, the one or more integrated circuits, the battery and the coupling material within the capsule.