ARC EVAPORATION DEVICE

• Main Authors: KAMEZAWA, Hideaki, FUJII, Hirofumi, TANIFUJI, Shinichi, SHIRANE, Hideki
• Format: Patent
• Language: English; French; German
• Published: 17.10.2018
• Subjects: CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

Provided is an arc evaporation device capable of precisely detecting, for a long period of time, whether or not a target is present at a predetermined position. The arc evaporation device (1) includes a bar-shaped target (3) having a front end surface (3a) and a side surface (3b) extending axially and continuously therewith and configured to be melted and evaporated from the front end surface (3a) by arc discharge; an arc power supply (8); a target feed unit (4) which moves the target (3) axially and in a feed direction in which the front end surface (3a) advances; an ignition rod (6) having a shape capable of contact with the side surface (3b) of the target (3), at a predetermined position with respect to the feed direction of the target (3), in an intersecting direction intersecting the feed direction; a rotary actuator (7) which moves the ignition rod (6) along the intersecting direction from a retraction position apart from the side surface (3b) in the intersecting direction to make the ignition rod (6) enter a transport region into which the target (3) is fed; and a detection unit (9) which detects whether or not the ignition rod (6) has come into contact with the side surface (3b) of the target (3) during movement of the ignition rod (6).