TUNGSTEN-PROCESSING SLURRY WITH CATIONIC SURFACTANT
Described are chemical mechanical polishing compositions and methods of using the compositions for planarizing a surface of a substrate that contains tungsten, the compositions containing silica abrasive particles and cationic surfactant.
Saved in:
| Main Authors | , , |
|---|---|
| Format | Patent |
| Language | English French German |
| Published |
19.06.2019
|
| Subjects | |
| Online Access | Get full text |
Cover
Loading…
| Abstract | Described are chemical mechanical polishing compositions and methods of using the compositions for planarizing a surface of a substrate that contains tungsten, the compositions containing silica abrasive particles and cationic surfactant. |
|---|---|
| AbstractList | Described are chemical mechanical polishing compositions and methods of using the compositions for planarizing a surface of a substrate that contains tungsten, the compositions containing silica abrasive particles and cationic surfactant. |
| Author | DOCKERY, Kevin FU, Lin HUANG, Helin |
| Author_xml | – fullname: FU, Lin – fullname: HUANG, Helin – fullname: DOCKERY, Kevin |
| BookMark | eNrjYmDJy89L5WQwDgn1cw8OcfXTDQjyd3YNDvb0c1cI9gkNCopUCPcM8VBwdgzx9PfzdFYIDg1yc3QOcfQL4WFgTUvMKU7lhdLcDApuriHOHrqpBfnxqcUFicmpeakl8a4BxsZmFmZGJo4mxkQoAQCVzSka |
| ContentType | Patent |
| DBID | EVB |
| DatabaseName | esp@cenet |
| DatabaseTitleList | |
| Database_xml | – sequence: 1 dbid: EVB name: esp@cenet url: http://worldwide.espacenet.com/singleLineSearch?locale=en_EP sourceTypes: Open Access Repository |
| DeliveryMethod | fulltext_linktorsrc |
| Discipline | Medicine Chemistry Sciences |
| DocumentTitleAlternate | WOLFRAMVERARBEITENDE SUSPENSION MIT KATIONISCHEM TENSID TRAITEMENT DE LA BOUE AU TUNGSTÈNE AVEC UN TENSIOACTIF CATIONIQUE |
| ExternalDocumentID | EP3368624A4 |
| GroupedDBID | EVB |
| ID | FETCH-epo_espacenet_EP3368624A43 |
| IEDL.DBID | EVB |
| IngestDate | Fri Jul 19 13:21:02 EDT 2024 |
| IsOpenAccess | true |
| IsPeerReviewed | false |
| IsScholarly | false |
| Language | English French German |
| LinkModel | DirectLink |
| MergedId | FETCHMERGED-epo_espacenet_EP3368624A43 |
| Notes | Application Number: EP20160860545 |
| OpenAccessLink | https://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20190619&DB=EPODOC&CC=EP&NR=3368624A4 |
| ParticipantIDs | epo_espacenet_EP3368624A4 |
| PublicationCentury | 2000 |
| PublicationDate | 20190619 |
| PublicationDateYYYYMMDD | 2019-06-19 |
| PublicationDate_xml | – month: 06 year: 2019 text: 20190619 day: 19 |
| PublicationDecade | 2010 |
| PublicationYear | 2019 |
| RelatedCompanies | Cabot Microelectronics Corporation |
| RelatedCompanies_xml | – name: Cabot Microelectronics Corporation |
| Score | 3.2151642 |
| Snippet | Described are chemical mechanical polishing compositions and methods of using the compositions for planarizing a surface of a substrate that contains tungsten,... |
| SourceID | epo |
| SourceType | Open Access Repository |
| SubjectTerms | ADHESIVES BASIC ELECTRIC ELEMENTS CHEMISTRY DYES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FORELSEWHERE METALLURGY MISCELLANEOUS APPLICATIONS OF MATERIALS MISCELLANEOUS COMPOSITIONS NATURAL RESINS PAINTS POLISHES POLISHING COMPOSITIONS OTHER THAN FRENCH POLISH SEMICONDUCTOR DEVICES SKI WAXES |
| Title | TUNGSTEN-PROCESSING SLURRY WITH CATIONIC SURFACTANT |
| URI | https://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20190619&DB=EPODOC&locale=&CC=EP&NR=3368624A4 |
| hasFullText | 1 |
| inHoldings | 1 |
| isFullTextHit | |
| isPrint | |
| link | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwfV1LT4NAEJ7UatSbVo31FQ6GG1FcWsqBGLpAqbFA6KL11LA8kl5oYzH-fYeVVi96m-wm-0pmvpnd-WYBbnmaayRNM4Ubg0LReJYrRkp0JeNZYahJcc8Fj3vi971Ye5r1Zi1YbLgwok7opyiOiBqVor5Xwl6vfi6xbJFbub7jC2xaPrrMtOUmOkZ0w4BAtoemEwZ2QGVKUZL9yCREUCEsbQd20YvW6-wv52VYk1JWvxHFPYK9EAcrq2No5WUHDujm47UO7E-a924UG9VbnwBhsT-aMsdXwiigtRH0R9L0OY6iN-l1zDzpmxE8ptI0jlyLMstnpyC5DqOegrPPtzudO-F2neQM2uWyzM9BypM-IrGKvlgx0LieJWpCatzup-hvDR7ULnT_HObin75LOKyPrE58Uo0raFfvH_k1QmzFb8ThfAHjinxU |
| link.rule.ids | 230,309,783,888,25578,76884 |
| linkProvider | European Patent Office |
| linkToHtml | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwfV1LT8JAEJ4gGvGmqBGfPZjeGq1boT0QA9uWorA0ZatwIt0-Ei6FSI1_3-kK6EVvk91kX8nMN7M73yzArYhTg8RxognLzDRDJKlmxaSlJSLJLD3K7oXkcQ9Z0wuN58njpALzDRdG1gn9lMURUaNi1PdC2uvlzyWWLXMrV3dijk2LJ5e3bXUdHSO6YUCg2t2244_sEVUpRUllQZsQSYXoGDuwix62WZbZd167JSll-RtR3EPY83GwvDiCSprXoUY3H6_VYX-4fu9Gca16q2MgPGS9MXeY5gcjWhpB1lPGgzAIpspbn3vKNyO4T5VxGLgdyjuMn4DiOpx6Gs4-2-505vjbdZJTqOaLPD0DJY2aiMQ6-mKZaYhWEukRKXG7GaO_ZT7oDWj8Ocz5P303UPP4cDAb9NnLBRyUx1cmQenWJVSL94_0CuG2ENfyoL4A30h_RA |
| openUrl | ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Apatent&rft.title=TUNGSTEN-PROCESSING+SLURRY+WITH+CATIONIC+SURFACTANT&rft.inventor=FU%2C+Lin&rft.inventor=HUANG%2C+Helin&rft.inventor=DOCKERY%2C+Kevin&rft.date=2019-06-19&rft.externalDBID=A4&rft.externalDocID=EP3368624A4 |