METHOD AND APPARATUS FOR DERIVING A TOPOGRAPY OF AN OBJECT SURFACE
The embodiments herein relate to a method for deriving topography of an object surface. A linearly polarized light wave is directed towards the object surface and a reference surface. Images of reflected linearly polarized light wave for a plurality of wavelengths are obtained. The images are obtain...
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Main Author | |
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Format | Patent |
Language | English French German |
Published |
27.06.2018
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Subjects | |
Online Access | Get full text |
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Summary: | The embodiments herein relate to a method for deriving topography of an object surface. A linearly polarized light wave is directed towards the object surface and a reference surface. Images of reflected linearly polarized light wave for a plurality of wavelengths are obtained. The images are obtained for at least four polarizations for each of the plurality of wavelengths. The reflected linearly polarized light wave is a reflection of the linearly polarized light wave directed towards the object surface and the reference surface. The topography of the object surface based on the obtained images is obtained. |
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Bibliography: | Application Number: EP20150753009 |