VALVE ASSEMBLIES AND FLUID STORAGE AND DISPENSING PACKAGES COMPRISING SAME

Fluid dispensing assemblies are disclosed, for use in fluid supply packages in which such fluid dispensing assemblies as coupled to fluid supply vessels, for dispensing of fluids such as semiconductor manufacturing fluids. The fluid dispensing assemblies in specific implementations are configured to...

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Bibliographic Details
Main Authors TANG, Ying, BYL, Oleg, WILSON, Shaun, M, SCANNELL, Christopher, MCMANUS, James, V, JONES, Edward, E, ULANECKI, Steven, BISHOP, Steven, E, OLANDER, W., Karl, CHAMBERS, Barry, Lewis, DESPRES, Joseph, R, SWEENEY, Joseph, D, ELZER, Daniel
Format Patent
LanguageEnglish
French
German
Published 21.03.2018
Subjects
BLASTING
FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED,LIQUEFIED, OR SOLIDIFIED GASES
FIXED-CAPACITY GAS-HOLDERS
HEATING
LIGHTING
MECHANICAL ENGINEERING
STORING OF DISTRIBUTING GASES OR LIQUIDS
VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED ORSOLIDIFIED GASES
WEAPONS
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Summary:Fluid dispensing assemblies are disclosed, for use in fluid supply packages in which such fluid dispensing assemblies as coupled to fluid supply vessels, for dispensing of fluids such as semiconductor manufacturing fluids. The fluid dispensing assemblies in specific implementations are configured to prevent application of excessive force to valve elements in the fluid dispensing assemblies, and/or for avoiding inadvertent or accidental open conditions of vessels that may result in leakage of toxic or otherwise hazardous or valuable gas. Also described are alignment devices for assisting coupling of coupling elements, e.g., coupling elements of fluid supply packages of the foregoing type, so that damage to such couplings as a result of misalignment is avoided.
Bibliography:Application Number: EP20160793464