BLOCK COPOLYMER
The present application provides a block copolymer and uses thereof. The block copolymer of the present application exhibits an excellent self-assembling property or phase separation property, can be provided with a variety of required functions without constraint and, especially, etching selectivit...
Saved in:
Main Authors | , , , , , , , |
---|---|
Format | Patent |
Language | English French German |
Published |
25.08.2021
|
Subjects | |
Online Access | Get full text |
Cover
Loading…
Summary: | The present application provides a block copolymer and uses thereof. The block copolymer of the present application exhibits an excellent self-assembling property or phase separation property, can be provided with a variety of required functions without constraint and, especially, etching selectivity can be secured, making the block copolymer effectively applicable to such uses as pattern formation. |
---|---|
Bibliography: | Application Number: EP20150846832 |