BLOCK COPOLYMER

The present application provides a block copolymer and uses thereof. The block copolymer of the present application exhibits an excellent self-assembling property or phase separation property, can be provided with a variety of required functions without constraint and, especially, etching selectivit...

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Bibliographic Details
Main Authors KIM, Jung Keun, PARK, No Jin, KU, Se Jin, LEE, Mi Sook, YOON, Sung Soo, CHOI, Eun Young, RYU, Hyung Ju, LEE, Je Gwon
Format Patent
LanguageEnglish
French
German
Published 25.08.2021
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Summary:The present application provides a block copolymer and uses thereof. The block copolymer of the present application exhibits an excellent self-assembling property or phase separation property, can be provided with a variety of required functions without constraint and, especially, etching selectivity can be secured, making the block copolymer effectively applicable to such uses as pattern formation.
Bibliography:Application Number: EP20150846832