ANALYSIS METHOD AND X-RAY PHOTOELECTRON SPECTROSCOPE
An analysis method includes: acquiring a photoelectron spectrum and an X-ray-excited Auger spectrum, the photoelectron spectrum being obtained by detecting photoelectrons emitted from a specimen (S) by irradiating the specimen with X-rays, and the X-ray-excited Auger spectrum being obtained by detec...
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| Main Author | |
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| Format | Patent |
| Language | English French German |
| Published |
03.03.2021
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| Online Access | Get full text |
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| Abstract | An analysis method includes: acquiring a photoelectron spectrum and an X-ray-excited Auger spectrum, the photoelectron spectrum being obtained by detecting photoelectrons emitted from a specimen (S) by irradiating the specimen with X-rays, and the X-ray-excited Auger spectrum being obtained by detecting Auger electrons emitted from the specimen (S) by irradiating the specimen (S) with X-rays; calculating a quantitative value of each element included in the specimen (S) based on the photoelectron spectrum; and performing a curve fitting process on the X-ray-excited Auger spectrum by using an electron beam-excited Auger electron standard spectrum, and calculating a quantitative value of an analysis target element in each chemical bonding state included in the specimen (S). |
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| AbstractList | An analysis method includes: acquiring a photoelectron spectrum and an X-ray-excited Auger spectrum, the photoelectron spectrum being obtained by detecting photoelectrons emitted from a specimen (S) by irradiating the specimen with X-rays, and the X-ray-excited Auger spectrum being obtained by detecting Auger electrons emitted from the specimen (S) by irradiating the specimen (S) with X-rays; calculating a quantitative value of each element included in the specimen (S) based on the photoelectron spectrum; and performing a curve fitting process on the X-ray-excited Auger spectrum by using an electron beam-excited Auger electron standard spectrum, and calculating a quantitative value of an analysis target element in each chemical bonding state included in the specimen (S). |
| Author | SHIMA, Masahide |
| Author_xml | – fullname: SHIMA, Masahide |
| BookMark | eNrjYmDJy89L5WQwcfRz9IkM9gxW8HUN8fB3UXD0c1GI0A1yjFQI8PAP8Xf1cXUOCfL3UwgOADOCnf0DXHkYWNMSc4pTeaE0N4OCm2uIs4duakF-fGpxQWJyal5qSbxrgLGhsaWhqYWToTERSgCP-ikI |
| ContentType | Patent |
| DBID | EVB |
| DatabaseName | esp@cenet |
| DatabaseTitleList | |
| Database_xml | – sequence: 1 dbid: EVB name: esp@cenet url: http://worldwide.espacenet.com/singleLineSearch?locale=en_EP sourceTypes: Open Access Repository |
| DeliveryMethod | fulltext_linktorsrc |
| Discipline | Medicine Chemistry Sciences Physics |
| DocumentTitleAlternate | ANALYSEVERFAHREN UND RÖNTGENLICHTELEKTRONENSPEKTROSKOP PROCÉDÉ D'ANALYSE ET SPECTROSCOPE PHOTOÉLECTRONIQUE AUX RAYONS X |
| ExternalDocumentID | EP3139158B1 |
| GroupedDBID | EVB |
| ID | FETCH-epo_espacenet_EP3139158B13 |
| IEDL.DBID | EVB |
| IngestDate | Fri Jul 19 15:31:36 EDT 2024 |
| IsOpenAccess | true |
| IsPeerReviewed | false |
| IsScholarly | false |
| Language | English French German |
| LinkModel | DirectLink |
| MergedId | FETCHMERGED-epo_espacenet_EP3139158B13 |
| Notes | Application Number: EP20160187259 |
| OpenAccessLink | https://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20210303&DB=EPODOC&CC=EP&NR=3139158B1 |
| ParticipantIDs | epo_espacenet_EP3139158B1 |
| PublicationCentury | 2000 |
| PublicationDate | 20210303 |
| PublicationDateYYYYMMDD | 2021-03-03 |
| PublicationDate_xml | – month: 03 year: 2021 text: 20210303 day: 03 |
| PublicationDecade | 2020 |
| PublicationYear | 2021 |
| RelatedCompanies | JEOL LTD |
| RelatedCompanies_xml | – name: JEOL LTD |
| Score | 3.3160675 |
| Snippet | An analysis method includes: acquiring a photoelectron spectrum and an X-ray-excited Auger spectrum, the photoelectron spectrum being obtained by detecting... |
| SourceID | epo |
| SourceType | Open Access Repository |
| SubjectTerms | INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING |
| Title | ANALYSIS METHOD AND X-RAY PHOTOELECTRON SPECTROSCOPE |
| URI | https://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20210303&DB=EPODOC&locale=&CC=EP&NR=3139158B1 |
| hasFullText | 1 |
| inHoldings | 1 |
| isFullTextHit | |
| isPrint | |
| link | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwfR1NS8Mw9DHm502r4vwiB-mtaJtsq4chbZpRZWtKW2U7jbZLYZduuIp_3yRs04vewgs8Xh68z7wPgHvHndukeCytyumWKnUj9aDoVpbrYKH6LHtE6CrfqBe-kddJd9KCxbYXRs8J_dLDEaVElVLeG62vVz9JrEDXVq4fioUELZ-H2SAwN9Gxo5ZmYTPwByzmAacmpfJkRskA22oSuuvLQGlPetF9JQzs3VdNKavfFmV4AvuxRFY3p9AStQFHdLt4zYDD8ea_24ADXaBZriVwI4TrMyBe5I2m6UuKxiwLeYC8KEATK_GmKA55xtmI0SzhEUpjfUgpj9k5oCHLaGhJQma7R89YvCMZX0C7XtbiElBJpAvWL52cCEx6GOf5XPTd6klUBJPCzjvQ-RPN1T9313CsuKeLq_ANtJuPT3ErrW1T3Gk-fQNXdX5J |
| link.rule.ids | 230,309,783,888,25576,76876 |
| linkProvider | European Patent Office |
| linkToHtml | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwfR1NT8Iw9IXgB94UNeJnD2a3RVk7mAdiRlcydKwLmwZOZBtdwmUQmfHv2zaAXvTWvCYvry95n30fAPeWM2-T7DE3C8vOVepG6kFhF6ZjYaH6LDtE6CrfsOO_kZeJPanBYtsLo-eEfunhiFKicinvldbXq58klqdrK9cP2UKCls-DpOcZm-jYUkuzsOH1eyziHqcGpfJkhOMebqtJ6E5fBkp70sPuKmFg733VlLL6bVEGx7AfSWRldQI1UTahQbeL15pwONr8dzfhQBdo5msJ3Ajh-hSIG7rBNB7GaMQSn3vIDT00McfuFEU-TzgLGE3GPERxpA8x5RE7AzRgCfVNSchs9-gZi3Yk43Ool8tSXADKiXTBurmVEoFJB-M0nYuuUzyJgmCStdMWtP5Ec_nP3R00_GQUzIJh-HoFR4qTutAKX0O9-vgUN9LyVtmt5tk3b22BPA |
| openUrl | ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Apatent&rft.title=ANALYSIS+METHOD+AND+X-RAY+PHOTOELECTRON+SPECTROSCOPE&rft.inventor=SHIMA%2C+Masahide&rft.date=2021-03-03&rft.externalDBID=B1&rft.externalDocID=EP3139158B1 |