ANALYSIS METHOD AND X-RAY PHOTOELECTRON SPECTROSCOPE

An analysis method includes: acquiring a photoelectron spectrum and an X-ray-excited Auger spectrum, the photoelectron spectrum being obtained by detecting photoelectrons emitted from a specimen (S) by irradiating the specimen with X-rays, and the X-ray-excited Auger spectrum being obtained by detec...

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Bibliographic Details
Main Author SHIMA, Masahide
Format Patent
LanguageEnglish
French
German
Published 03.03.2021
Subjects
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
TESTING
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Summary:An analysis method includes: acquiring a photoelectron spectrum and an X-ray-excited Auger spectrum, the photoelectron spectrum being obtained by detecting photoelectrons emitted from a specimen (S) by irradiating the specimen with X-rays, and the X-ray-excited Auger spectrum being obtained by detecting Auger electrons emitted from the specimen (S) by irradiating the specimen (S) with X-rays; calculating a quantitative value of each element included in the specimen (S) based on the photoelectron spectrum; and performing a curve fitting process on the X-ray-excited Auger spectrum by using an electron beam-excited Auger electron standard spectrum, and calculating a quantitative value of an analysis target element in each chemical bonding state included in the specimen (S).
Bibliography:Application Number: EP20160187259