SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
A semiconductor substrate (SUB), an insulating layer (BOX) made of silicon oxide formed on the semiconductor substrate and a semiconductor layer (SL) made of silicon formed on the insulating layer are provided, and the semiconductor layer constitutes an optical waveguide (PO) in an optical signal tr...
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Main Authors | , |
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Format | Patent |
Language | English French German |
Published |
03.01.2018
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Subjects | |
Online Access | Get full text |
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