SYSTEM FOR GAS DISTRIBUTION AND MASS FLOW MEASUREMENT

A gas distribution system may include a gas mass flow sensor (206, 506) with a resistive element (230) configured to be heated, a thermally conductive shell (228, 528) surrounding the resistive element and heat-transfer control elements. The shell may include a leading surface (236, 536) oriented su...

Full description

Saved in:
Bibliographic Details
Main Authors FACINELLI, William, KANG, Alan, SHEORAN, Yogendra Yogi, EARL, Andrew, ISOBE, Jun
Format Patent
LanguageEnglish
French
German
Published 11.07.2018
Subjects
Online AccessGet full text

Cover

Loading…