SYSTEM FOR GAS DISTRIBUTION AND MASS FLOW MEASUREMENT
A gas distribution system may include a gas mass flow sensor (206, 506) with a resistive element (230) configured to be heated, a thermally conductive shell (228, 528) surrounding the resistive element and heat-transfer control elements. The shell may include a leading surface (236, 536) oriented su...
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Main Authors | , , , , |
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Format | Patent |
Language | English French German |
Published |
11.07.2018
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Subjects | |
Online Access | Get full text |
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