Vertical semiconductor device, and method of manufacturing the vertical semiconductor device

• Main Authors: NIIMURA, Yasushi, SAKATA, Toshiaki
• Format: Patent
• Language: English; French; German
• Published: 05.08.2020
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

Provided is a vertical semiconductor device 100, and a method of manufacturing the vertical semiconductor device 100, such that it is possible to obtain low on-state resistance, high avalanche withstand, high turn-off withstand, and high reverse recovery withstand. A vertical semiconductor device 10...