ELECTROSTATIC CHUCK WITH PHOTO-PATTERNABLE SOFT PROTRUSION CONTACT SURFACE

Saved in:
Bibliographic Details
Main Authors LIN, I-KUAN, COOKE, RICHARD, A, RYBCZYNSKI, JAKUB
Format Patent
LanguageEnglish
French
German
Published 09.09.2015
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
Online AccessGet full text

Cover

Author COOKE, RICHARD, A
LIN, I-KUAN
RYBCZYNSKI, JAKUB
Author_xml – fullname: LIN, I-KUAN
– fullname: COOKE, RICHARD, A
– fullname: RYBCZYNSKI, JAKUB
BookMark eNqNyr0KwjAQAOAMOvj3DvcCHaIIdozHhURLLiQXHEuROElbqO-Piw_g9C3fVq3GaawbdaOOUBJnMeIR0BW8w8OLg-hYuIlGhFIw144gsxWIiSWV7DkAchCDArkka5D2av0a3ks9_NwpsCTomjpPfV3m4VnH-ukpHlt91pfW6NMf5Qtv0S9c
ContentType Patent
DBID EVB
DatabaseName esp@cenet
Database_xml – sequence: 1
  dbid: EVB
  name: esp@cenet
  url: http://worldwide.espacenet.com/singleLineSearch?locale=en_EP
  sourceTypes: Open Access Repository
DeliveryMethod fulltext_linktorsrc
Discipline Medicine
Chemistry
Sciences
DocumentTitleAlternate ELEKTROSTATISCHES FUTTER MIT EINER WEICHEN HERVORSTEHENDEN LICHTMUSTERUNGS-KONTAKTOBERFLÄCHE
MANDRIN ÉLECTROSTATIQUE POSSÉDANT UNE SURFACE DE CONTACT À SAILLIE SOUPLE POUVANT ÊTRE CONFIGURÉE À LA LUMIÈRE
ExternalDocumentID EP2915189A1
GroupedDBID EVB
ID FETCH-epo_espacenet_EP2915189A13
IEDL.DBID EVB
IngestDate Fri Jul 19 12:21:31 EDT 2024
IsOpenAccess true
IsPeerReviewed false
IsScholarly false
Language English
French
German
LinkModel DirectLink
MergedId FETCHMERGED-epo_espacenet_EP2915189A13
Notes Application Number: EP20130793014
OpenAccessLink https://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20150909&DB=EPODOC&CC=EP&NR=2915189A1
ParticipantIDs epo_espacenet_EP2915189A1
PublicationCentury 2000
PublicationDate 20150909
PublicationDateYYYYMMDD 2015-09-09
PublicationDate_xml – month: 09
  year: 2015
  text: 20150909
  day: 09
PublicationDecade 2010
PublicationYear 2015
RelatedCompanies ENTEGRIS, INC
RelatedCompanies_xml – name: ENTEGRIS, INC
Score 2.998566
SourceID epo
SourceType Open Access Repository
SubjectTerms BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
Title ELECTROSTATIC CHUCK WITH PHOTO-PATTERNABLE SOFT PROTRUSION CONTACT SURFACE
URI https://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20150909&DB=EPODOC&locale=&CC=EP&NR=2915189A1
hasFullText 1
inHoldings 1
isFullTextHit
isPrint
link http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwfV3dT8IwEL8QNeqbokb8Sh_M3hYRNlgfiBldl0GALqMob8TuI-FlEJnx3_faAPqib5c2uVwu_d1He3cFeESvo6hKm3bqtt9tJ3OUTTPVtvV5yjpp9uxkut95POlEM2c4d-c1WO56Ycyc0C8zHBERlSLeK2Ov1z-XWIGprdw8qSUurV5C2QusbXaM0Q1tUivo93gsAsEsxpCyJkmvRdG1edTHROkQo-iuBgN_7eumlPVvjxKewVGMzMrqHGp5WYcTtvt4rQ7H4-17N5Jb6G0uYMhHnMlETKUvB4ywCINL8jaQEYkjIYUd-9IMt-2POJmKUJI4ETKZaVtJmJhIn0kynSWhz_glkJBLFtko1GKvgAWP9-K3r-CgXJX5NRAEo6e8jircVqH_ifO6eVpgCKNyL6WOWzSg8Sebm3_2buFUa9IUUtE7OKg-PvN79LyVejA6-wbexYJc
link.rule.ids 230,309,783,888,25576,76876
linkProvider European Patent Office
linkToHtml http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwfV1LT8JAEJ4QNOJNUSM-92B6a0RooXsgpmy3KVi6TVmUG3H7SLgUIjX-facNoBe9TXaTyWSy3zx2Z2YBHtDrKKrith6b3XfdSAyl00R19fI8Jb04eTKSst95EvS8mTGem_MaLHe9MNWc0K9qOCIiKka8F5W9Xv9cYjlVbeXmUS1xafXsyoGjbbNjjG5om2rOcMBD4QimMYaUFkSDDkXXZlEbE6UDjLD7JRj467BsSln_9ijuCRyGyCwvTqGW5k1osN3Ha004mmzfu5HcQm9zBmPucyYjMZW2HDHCPAwuydtIeiT0hBR6aMtquO3Q52QqXEnCSMhoVtpKwkQgbSbJdBa5NuPnQFwumaejUIu9AhY83IvfvYB6vsrTSyAIRktZPZWZnaz8J87qp3GGIYxKrZgaZtaC1p9srv7Zu4eGJyf-wh8FL9dwXGq1KqqiN1AvPj7TW_TChbqr9PcNJ2iFTw
openUrl ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Apatent&rft.title=ELECTROSTATIC+CHUCK+WITH+PHOTO-PATTERNABLE+SOFT+PROTRUSION+CONTACT+SURFACE&rft.inventor=LIN%2C+I-KUAN&rft.inventor=COOKE%2C+RICHARD%2C+A&rft.inventor=RYBCZYNSKI%2C+JAKUB&rft.date=2015-09-09&rft.externalDBID=A1&rft.externalDocID=EP2915189A1