Semiconductor device including a semiconductor buffer structure, and method of manufacturing the semiconductor device using the semiconductor buffer structure
A semiconductor buffer structure includes a silicon substrate, a nucleation layer formed on the silicon substrate, and a buffer layer formed on the nucleation layer. The buffer layer includes a first layer formed of a nitride semiconductor material having a uniform composition rate, a second layer f...
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| Format | Patent |
| Language | English French German |
| Published |
04.12.2019
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| Online Access | Get full text |
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| Abstract | A semiconductor buffer structure includes a silicon substrate, a nucleation layer formed on the silicon substrate, and a buffer layer formed on the nucleation layer. The buffer layer includes a first layer formed of a nitride semiconductor material having a uniform composition rate, a second layer formed of the same material as the nucleation layer on the first layer, and a third layer formed of the same material with the same composition ratio as the first layer on the second layer. |
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| AbstractList | A semiconductor buffer structure includes a silicon substrate, a nucleation layer formed on the silicon substrate, and a buffer layer formed on the nucleation layer. The buffer layer includes a first layer formed of a nitride semiconductor material having a uniform composition rate, a second layer formed of the same material as the nucleation layer on the first layer, and a third layer formed of the same material with the same composition ratio as the first layer on the second layer. |
| Author | Kim, Joo-sung Chae, Su-hee Kim, Jun-youn Park, Young-soo Tak, Young-jo Kim, Jae-kyun |
| Author_xml | – fullname: Chae, Su-hee – fullname: Kim, Jun-youn – fullname: Park, Young-soo – fullname: Kim, Jae-kyun – fullname: Tak, Young-jo – fullname: Kim, Joo-sung |
| BookMark | eNqNjTsOwjAYgzPAwOsO_wFggEgIVlARIxLsVUgcGqn9U-XBcTgrVOpCxcBkWf5sT8WIPWMiXlc0Tns2WScfyODpNMixrrNx_CBF8Qu4Z2sRKKbw8TlgSYoNNUiVN-QtNYqzVV3UtVOFQb8_yPF3PJyfi7FVdcSi15mgU3E7nldofYnYKg1GKovLZrfdSykPa_kH8gaculey |
| ContentType | Patent |
| DBID | EVB |
| DatabaseName | esp@cenet |
| DatabaseTitleList | |
| Database_xml | – sequence: 1 dbid: EVB name: esp@cenet url: http://worldwide.espacenet.com/singleLineSearch?locale=en_EP sourceTypes: Open Access Repository |
| DeliveryMethod | fulltext_linktorsrc |
| Discipline | Medicine Chemistry Sciences |
| DocumentTitleAlternate | Dispositif semi-conducteur comprenant une structure de tampon à semi-conductor et procédé de fabrication d'un tel dispositif utilisant ladite structure Halbleitervorrichtung mit einer Halbleiterpufferstruktur und Verfahren zur Herstellung der Halbleitervorrichtung mit der Halbleiterpufferstruktur |
| ExternalDocumentID | EP2869333B1 |
| GroupedDBID | EVB |
| ID | FETCH-epo_espacenet_EP2869333B13 |
| IEDL.DBID | EVB |
| IngestDate | Fri Jul 19 15:03:32 EDT 2024 |
| IsOpenAccess | true |
| IsPeerReviewed | false |
| IsScholarly | false |
| Language | English French German |
| LinkModel | DirectLink |
| MergedId | FETCHMERGED-epo_espacenet_EP2869333B13 |
| Notes | Application Number: EP20140189626 |
| OpenAccessLink | https://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20191204&DB=EPODOC&CC=EP&NR=2869333B1 |
| ParticipantIDs | epo_espacenet_EP2869333B1 |
| PublicationCentury | 2000 |
| PublicationDate | 20191204 |
| PublicationDateYYYYMMDD | 2019-12-04 |
| PublicationDate_xml | – month: 12 year: 2019 text: 20191204 day: 04 |
| PublicationDecade | 2010 |
| PublicationYear | 2019 |
| RelatedCompanies | Samsung Electronics Co., Ltd |
| RelatedCompanies_xml | – name: Samsung Electronics Co., Ltd |
| Score | 3.244246 |
| Snippet | A semiconductor buffer structure includes a silicon substrate, a nucleation layer formed on the silicon substrate, and a buffer layer formed on the nucleation... |
| SourceID | epo |
| SourceType | Open Access Repository |
| SubjectTerms | BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES |
| Title | Semiconductor device including a semiconductor buffer structure, and method of manufacturing the semiconductor device using the semiconductor buffer structure |
| URI | https://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20191204&DB=EPODOC&locale=&CC=EP&NR=2869333B1 |
| hasFullText | 1 |
| inHoldings | 1 |
| isFullTextHit | |
| isPrint | |
| link | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwfV3dT8IwEL8QNOqbokb8Sh8MTy7iNsb6QEz2QYgJH1E0vJEWSrIEOwIs_jf-rd6VgUrUt2Ztb1sv17tr734HcDPmssqlEpatlG_hLnlvScevWULavI4mAhfmuqDd8Vov7uOgNihAss6FMTih7wYcESVqhPK-NPv17OsQKzKxlYs7meCj9KHZb0SV3DtG58NGpkdBI-51o25YCUNsVTpPDdv30HV3AnSUdsiKJpj9-DWgpJTZd43SPITdHhLTyyMoKF2C_XBdeK0Ee-38vhubuegtjuHjmcLYU034rOmcjRWJOEv0aJqR-mGCLX4MkBlVPmErfNhsrm6Z0GO2KhjN0gl7EzqjrAaTpsjQDNyan7-A4uJ_694mfwKsGffDloU_Otws6jDubZbEOYWiTrU6A4b2jut76BOhqBPWupgoThDz0pH1Ca_KMpT_JHP-T98FHBB3TByIewlF_Dh1hdp8Ka8NHz4B5hGpRw |
| link.rule.ids | 230,309,786,891,25594,76903 |
| linkProvider | European Patent Office |
| linkToHtml | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwfV3dT8IwEL8QNOKbokb87IPhyUXcBmwPi8k-CCobRNHwRlooyRLsCGzxv_Fv9VoGKlHfmnW7bb1cr7_27ncAV2Ob1WzGqaZzbmk4S95qzLDqGmW63cQlgk3VcUEYNdov5sOgPihAvMqFUTyh74ocES1qhPaeqvl69rWJ5avYysUNi_FSctfqO341R8cIPnRUuu86Qa_rd72q52GrGj05utVA6G64CJS2mogIFVJ6dWVSyuy7R2ntwXYPhYl0HwpclKHkrQqvlWEnzM-7sZmb3uIAPp5lGHsiJD9rMidjLk2cxGI0zaT7IZQsftzAMln5hCz5YbM5vyZUjMmyYDRJJuSNikxmNag0RYLLwI3n8xfIuPjfujfFHwJpBX2vreGPDteDOgx66yExjqAoEsGPgeB6x7QaiInQ1CXXOp1wW1LMM4M1J3aNVaDyp5iTf_ouodTuh51h5z56PIVdqSkVE2KeQRE_lJ-jZ0_ZhdLJJ_aVrDE |
| openUrl | ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Apatent&rft.title=Semiconductor+device+including+a+semiconductor+buffer+structure%2C+and+method+of+manufacturing+the+semiconductor+device+using+the+semiconductor+buffer+structure&rft.inventor=Chae%2C+Su-hee&rft.inventor=Kim%2C+Jun-youn&rft.inventor=Park%2C+Young-soo&rft.inventor=Kim%2C+Jae-kyun&rft.inventor=Tak%2C+Young-jo&rft.inventor=Kim%2C+Joo-sung&rft.date=2019-12-04&rft.externalDBID=B1&rft.externalDocID=EP2869333B1 |