INSPECTION METHODS FOR PECVD COATINGS
A method for inspecting the product of a coating process is provided. In certain embodiments, the release of at least one volatile species from the coated surface into the gas space adjacent to the coated surface is measured and the result is compared with the result for at least one reference objec...
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Main Authors | , , , , , , , |
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Format | Patent |
Language | English French German |
Published |
18.03.2015
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Subjects | |
Online Access | Get full text |
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Abstract | A method for inspecting the product of a coating process is provided. In certain embodiments, the release of at least one volatile species from the coated surface into the gas space adjacent to the coated surface is measured and the result is compared with the result for at least one reference object measured under the same test conditions. Microbalance weighing methods are also disclosed to detect and distinguish among PECVD coatings. Thus the presence or absence of the coating, and/or a physical and/or chemical property of the coating can be determined. The method is useful for inspecting any coated articles, e.g. vessels. Its application on the inspection of PECVD coatings made from organosilicon precursors, especially of barrier coatings, is also disclosed. |
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AbstractList | A method for inspecting the product of a coating process is provided. In certain embodiments, the release of at least one volatile species from the coated surface into the gas space adjacent to the coated surface is measured and the result is compared with the result for at least one reference object measured under the same test conditions. Microbalance weighing methods are also disclosed to detect and distinguish among PECVD coatings. Thus the presence or absence of the coating, and/or a physical and/or chemical property of the coating can be determined. The method is useful for inspecting any coated articles, e.g. vessels. Its application on the inspection of PECVD coatings made from organosilicon precursors, especially of barrier coatings, is also disclosed. |
Author | PANGBORN, ROBERT J SAGONA, PETER J ABRAMS, ROBERT S WEIKART, CHRISTOPHER FERGUSON, JOHN FREEDMAN, JONATHAN R FISK, THOMAS E FELTS, JOHN T |
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DocumentTitleAlternate | PROCÉDÉS D'INSPECTION POUR DES REVÊTEMENTS PECVD INSPEKTIONSVERFAHREN FÜR PECVD-BESCHICHTUNGEN |
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RelatedCompanies | SIO2 MEDICAL PRODUCTS, INC |
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Snippet | A method for inspecting the product of a coating process is provided. In certain embodiments, the release of at least one volatile species from the coated... |
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SubjectTerms | CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROMTHE BODY DIAGNOSIS DIFFUSION TREATMENT OF METALLIC MATERIAL HUMAN NECESSITIES HYGIENE IDENTIFICATION INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS MEDICAL OR VETERINARY SCIENCE METALLURGY PHYSICS SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION SURGERY TESTING WEIGHING |
Title | INSPECTION METHODS FOR PECVD COATINGS |
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