Method and system for operating a MEMS tuning fork gyroscope

• Main Authors: SUTTON, MICHAEL S, WEBER, MARK W
• Format: Patent
• Language: English; French; German
• Published: 01.10.2014
• Subjects: GYROSCOPIC INSTRUMENTS; MEASURING; MEASURING DISTANCES, LEVELS OR BEARINGS; NAVIGATION; PHOTOGRAMMETRY OR VIDEOGRAMMETRY; PHYSICS; SURVEYING; TESTING

Embodiments of the subject application provide a method for operating a micro-electro-mechanical system (MEMS) tuning fork gyroscope. The method includes oscillating a voltage on a first sense electrode (107) out-of-plane from and proximate a first side of a first proof mass (102) between a first vo...