PRESSURE SENSOR

One or more reactive gases are introduced to a capacitance manometer at a particular area or areas of the diaphragm between the inner and outer capacitive electrodes so the error-inducing measurement effects of positive and negative bending are neutralized or minimized. Additionally, a guard structu...

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Bibliographic Details
Main Authors BLANKENSHIP, Steven, D, LUCAS, Paul, D
Format Patent
LanguageEnglish
French
German
Published 28.08.2019
Subjects
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