PRESSURE SENSOR
One or more reactive gases are introduced to a capacitance manometer at a particular area or areas of the diaphragm between the inner and outer capacitive electrodes so the error-inducing measurement effects of positive and negative bending are neutralized or minimized. Additionally, a guard structu...
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Main Authors | , |
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Format | Patent |
Language | English French German |
Published |
28.08.2019
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Subjects | |
Online Access | Get full text |
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