Three-dimensional shape measuring apparatus and control method thereof

An exposure amount of at least one or more first patterns used to determine positions at the time of triangulation is set to be larger than that of other patterns, so as to reduce the influence of shot noise in the first patterns, to improve precision, and to reduce power consumption as a whole. To...

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Bibliographic Details
Main Authors TSUYUKI, MOTOMI, ANDO, TOSHINORI
Format Patent
LanguageEnglish
French
German
Published 18.06.2014
Subjects
MEASURING
MEASURING ANGLES
MEASURING AREAS
MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS
PHYSICS
TESTING
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Summary:An exposure amount of at least one or more first patterns used to determine positions at the time of triangulation is set to be larger than that of other patterns, so as to reduce the influence of shot noise in the first patterns, to improve precision, and to reduce power consumption as a whole. To this end, a three-dimensional shape measuring apparatus, which measures a three-dimensional shape of an object to be measured by projecting pattern light of a plurality of types of patterns onto the object to be measured, and capturing images of the object to be measured, controls a projector unit and image capture unit to set an exposure amount of the first patterns to be larger than that of patterns other than the first patterns.
Bibliography:Application Number: EP20130196610