OPTICAL WAVEGUIDE DEVICE
Provided is an optical waveguide device capable of reducing stress that occurs inside an optical waveguide substrate due to a difference in a coefficient of thermal expansion. The optical waveguide device (10) includes an optical waveguide substrate (11) having a thickness of 30 µm or less, and a li...
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Main Authors | , , |
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Format | Patent |
Language | English French German |
Published |
17.12.2014
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Subjects | |
Online Access | Get full text |
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