DEVICE AND METHOD FOR GENERATING A PLASMA DISCHARGE FOR PATTERNING THE SURFACE OF A SUBSTRATE
Device for generating a plasma discharge near a substrate for patterning the surface of the substrate, comprising a first electrode having a first discharge portion and a second electrode having a second discharge portion, a high voltage source for generating a high voltage difference between the fi...
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Main Authors | , , , , , , , |
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Format | Patent |
Language | English French German |
Published |
26.12.2012
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Subjects | |
Online Access | Get full text |
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Abstract | Device for generating a plasma discharge near a substrate for patterning the surface of the substrate, comprising a first electrode having a first discharge portion and a second electrode having a second discharge portion, a high voltage source for generating a high voltage difference between the first and the second electrode, and positioning means for positioning the first electrode with respect to the substrate. The device is further provided with an intermediate structure that is, in use, arranged in between the first electrode and the substrate while allowing for positioning the first electrode with respect to the substrate. |
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AbstractList | Device for generating a plasma discharge near a substrate for patterning the surface of the substrate, comprising a first electrode having a first discharge portion and a second electrode having a second discharge portion, a high voltage source for generating a high voltage difference between the first and the second electrode, and positioning means for positioning the first electrode with respect to the substrate. The device is further provided with an intermediate structure that is, in use, arranged in between the first electrode and the substrate while allowing for positioning the first electrode with respect to the substrate. |
Author | BLOM, PAULUS PETRUS MARIA DE HAAN, HUGO ANTON MARIE VAN HIJNINGEN, NICOLAAS CORNELIS JOSEPHUS STEVENS, ALQUIN ALPHONS ELISABETH TE SLIGTE, EDWIN HUIJBREGTS, LAURENTIA JOHANNA VAN SCHIJNDEL, ANTONIUS HUBERTUS HUISKAMP, TOM |
Author_xml | – fullname: HUISKAMP, TOM – fullname: VAN SCHIJNDEL, ANTONIUS HUBERTUS – fullname: VAN HIJNINGEN, NICOLAAS CORNELIS JOSEPHUS – fullname: BLOM, PAULUS PETRUS MARIA – fullname: TE SLIGTE, EDWIN – fullname: DE HAAN, HUGO ANTON MARIE – fullname: STEVENS, ALQUIN ALPHONS ELISABETH – fullname: HUIJBREGTS, LAURENTIA JOHANNA |
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DocumentTitleAlternate | DISPOSITIF ET PROCÉDÉ DE GÉNÉRATION DE DÉCHARGE DE PLASMA POUR FORMER UN MOTIF SUR LA SURFACE D'UN SUBSTRAT VORRICHTUNG UND VERFAHREN ZUR ERZEUGUNG EINER PLASMAENTLADUNG ZUR STRUKTURIERUNG DER OBERFLÄCHE EINES SUBSTRATS |
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Notes | Application Number: EP20100704849 |
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Snippet | Device for generating a plasma discharge near a substrate for patterning the surface of the substrate, comprising a first electrode having a first discharge... |
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SubjectTerms | CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY PLASMA TECHNIQUE PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION |
Title | DEVICE AND METHOD FOR GENERATING A PLASMA DISCHARGE FOR PATTERNING THE SURFACE OF A SUBSTRATE |
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