MEMS DEVICE AND METHOD OF FABRICATION

• Main Authors: HUCKER, MARTYN JOHN, ELEY, REBECKA, STURLAND, IAN MICHAEL
• Format: Patent
• Language: English; French; German
• Published: 27.01.2016
• Subjects: ELECTRICITY; MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES; MICROSTRUCTURAL TECHNOLOGY; PERFORMING OPERATIONS; TRANSPORTING

A MEMS device (e.g. a piezoelectric actuator), and method of fabrication thereof, having a moveable portion comprising a layer of material (6) (e.g. a substrate layer formed from a substrate wafer) having relatively low rigidity in a direction in the plane of a surface of the layer of material (6),...