METHOD FOR FORMING A METAL OXIDE THIN-FILM PATTERN AND PRODUCTION METHOD FOR AN LED ELEMENT USING NANOIMPRINTING
A method for forming a metal oxide thin film pattern using nanoimprinting according to one embodiment of the present invention includes: coating a photosensitive metal-organic material precursor solution on a substrate; pressurizing the photosensitive metal-organic material precursor coating layer t...
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Main Authors | , , , , , , , , |
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Format | Patent |
Language | English French German |
Published |
25.02.2015
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Subjects | |
Online Access | Get full text |
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