ANGULAR RATE SENSOR
A rate-of-rotation sensor having a substrate and a first Coriolis element are provided, an excitation arrangement being provided for the excitation of vibrations of the first Coriolis element in a first direction, a first detection arrangement being provided for detecting a first deflection of the f...
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Main Authors | , |
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Format | Patent |
Language | English French German |
Published |
29.08.2018
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Subjects | |
Online Access | Get full text |
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