ANGULAR RATE SENSOR

A rate-of-rotation sensor having a substrate and a first Coriolis element are provided, an excitation arrangement being provided for the excitation of vibrations of the first Coriolis element in a first direction, a first detection arrangement being provided for detecting a first deflection of the f...

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Bibliographic Details
Main Authors GRACKI, Sebastian, CLASSEN, Johannes
Format Patent
LanguageEnglish
French
German
Published 29.08.2018
Subjects
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