PRINTABILITY VERIFICATION BY PROGRESSIVE MODELING ACCURACY

• Main Authors: LAI, KAFAI, MUKHERJEE, MAHARAJ, GALLATIN, GREGG M, ROSENBLUTH, ALAN E
• Format: Patent
• Language: English; French; German
• Published: 09.12.2009
• Subjects: CALCULATING; COMPUTING; COUNTING; ELECTRIC DIGITAL DATA PROCESSING; PHYSICS

A fast method of verifying a lithographic mask design is provided wherein catastrophic errors are identified by iteratively simulating and verifying images for the mask layout using progressively more accurate image models, including optical and resist models. Progressively accurate optical models i...