ADJUSTING DEVICE WITH HIGH POSITION RESOLUTION, EVEN IN THE NANO- OR SUBNANOMETER RANGE

The invention relates to an adjusting device with high position resolution, even in the nano- or subnanometer range and a regulating distance of a few micrometers up to several hundred millimeters, wherein PZT-solid state actuators in a closed-loop control circuit are used for the main control direc...

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Bibliographic Details
Main Authors LIANG, RONG, MARTH, HARRY, PERTSCH, PATRICK
Format Patent
LanguageEnglish
French
German
Published 27.05.2009
Subjects
CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
GENERATION
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