MICROMECHANIC COMPONENT HAVING MEMBRANE AND METHOD FOR THE PRODUCTION THEREOF

The component has a membrane on an upper side and a counter unit, where a hollow space is formed between the membrane and the counter unit. The counter unit has a passage hole (4) in a rear volume that is formed by a closed hollow space below the counter unit. The hollow space contacts the upper sid...

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Bibliographic Details
Main Authors FEYH, ANDO, LAMMER, MARCO
Format Patent
LanguageEnglish
French
German
Published 04.03.2009
Subjects
DEAF-AID SETS
ELECTRIC COMMUNICATION TECHNIQUE
ELECTRICITY
LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKEACOUSTIC ELECTROMECHANICAL TRANSDUCERS
MICROSTRUCTURAL TECHNOLOGY
PERFORMING OPERATIONS
PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
PUBLIC ADDRESS SYSTEMS
TRANSPORTING
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Summary:The component has a membrane on an upper side and a counter unit, where a hollow space is formed between the membrane and the counter unit. The counter unit has a passage hole (4) in a rear volume that is formed by a closed hollow space below the counter unit. The hollow space contacts the upper side of the membrane below the counter unit through a pressure balance opening (5). The hollow space below the counter unit has a lateral contraction. The membrane and the counter unit function as electrodes for capacitive detection of membrane deformations. An independent claim is also included for a method for manufacturing a micromechanical component with a membrane.
Bibliography:Application Number: EP20070727654