METHOD AND APPARATUS OF HIGH SPEED PROPERTY MAPPING

A probe instrument having a probe that interacts with a sample surface to perform a mechanical property measurement at high speed includes a scanner producing relative motion between the sample and the probe. In addition, a probe actuator produces relative motion between the sample and the probe, in...

Full description

Saved in:
Bibliographic Details
Main Authors LOMBROZO, PETER M, SU, CHANMIN
Format Patent
LanguageEnglish
French
German
Published 28.10.2009
Subjects
APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBEMICROSCOPY [SPM]
MEASURING
PHYSICS
SCANNING-PROBE TECHNIQUES OR APPARATUS
TESTING
Online AccessGet full text

Cover

Abstract A probe instrument having a probe that interacts with a sample surface to perform a mechanical property measurement at high speed includes a scanner producing relative motion between the sample and the probe. In addition, a probe actuator produces relative motion between the sample and the probe, in a generally vertical direction, and a controller that generates a scanner drive signal and an actuator drive signal. The probe actuator is responsive to the actuator drive signal and has an operable bandwidth of at least about 50-80 kHz to perform the fast force curve measurements. The probe actuator is preferably located at least partially on the cantilever. Moreover, feedback during normal operation may be interrupted to perform a force curve measurement with the integrated actuator.
AbstractList A probe instrument having a probe that interacts with a sample surface to perform a mechanical property measurement at high speed includes a scanner producing relative motion between the sample and the probe. In addition, a probe actuator produces relative motion between the sample and the probe, in a generally vertical direction, and a controller that generates a scanner drive signal and an actuator drive signal. The probe actuator is responsive to the actuator drive signal and has an operable bandwidth of at least about 50-80 kHz to perform the fast force curve measurements. The probe actuator is preferably located at least partially on the cantilever. Moreover, feedback during normal operation may be interrupted to perform a force curve measurement with the integrated actuator.
Author SU, CHANMIN
LOMBROZO, PETER M
Author_xml – fullname: LOMBROZO, PETER M
– fullname: SU, CHANMIN
BookMark eNrjYmDJy89L5WQw9nUN8fB3UXD0A-KAAMcgx5DQYAV_NwUPT3cPheAAV1cXhYAg_wDXoJBIBV-gCk8_dx4G1rTEnOJUXijNzaDg5hri7KGbWpAfn1pckJicmpdaEu8aYGhpbGFgYuBoYkyEEgA7GyhU
ContentType Patent
DBID EVB
DatabaseName esp@cenet
DatabaseTitleList
Database_xml – sequence: 1
  dbid: EVB
  name: esp@cenet
  url: http://worldwide.espacenet.com/singleLineSearch?locale=en_EP
  sourceTypes: Open Access Repository
DeliveryMethod fulltext_linktorsrc
Discipline Medicine
Chemistry
Sciences
Physics
DocumentTitleAlternate VERFAHREN UND VORRICHTUNG ZUR SCHNELLEN EIGENSCHAFTSABBILDUNG
PROCEDE ET APPAREIL DE CARTOGRAPHIE D'UNE PROPRIETE A HAUTE VITESSE
ExternalDocumentID EP1938040A4
GroupedDBID EVB
ID FETCH-epo_espacenet_EP1938040A43
IEDL.DBID EVB
IngestDate Fri Jul 19 15:14:46 EDT 2024
IsOpenAccess true
IsPeerReviewed false
IsScholarly false
Language English
French
German
LinkModel DirectLink
MergedId FETCHMERGED-epo_espacenet_EP1938040A43
Notes Application Number: EP20060804274
OpenAccessLink https://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20091028&DB=EPODOC&CC=EP&NR=1938040A4
ParticipantIDs epo_espacenet_EP1938040A4
PublicationCentury 2000
PublicationDate 20091028
PublicationDateYYYYMMDD 2009-10-28
PublicationDate_xml – month: 10
  year: 2009
  text: 20091028
  day: 28
PublicationDecade 2000
PublicationYear 2009
RelatedCompanies VEECO INSTRUMENTS INC
RelatedCompanies_xml – name: VEECO INSTRUMENTS INC
Score 2.7562978
Snippet A probe instrument having a probe that interacts with a sample surface to perform a mechanical property measurement at high speed includes a scanner producing...
SourceID epo
SourceType Open Access Repository
SubjectTerms APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBEMICROSCOPY [SPM]
MEASURING
PHYSICS
SCANNING-PROBE TECHNIQUES OR APPARATUS
TESTING
Title METHOD AND APPARATUS OF HIGH SPEED PROPERTY MAPPING
URI https://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20091028&DB=EPODOC&locale=&CC=EP&NR=1938040A4
hasFullText 1
inHoldings 1
isFullTextHit
isPrint
link http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwfV3NS8MwFH_M-XnTqTi_yEF6K25NW9rDkK5NV4W2YetknkbbZbBLN1zFf9-XuE0vegiEFwhJyMvLy_u9XwAe0CjMOnOR68KYdXTTci1dckDrkv5sNu-UhvENkE3saGy-TKxJAxbbXBjFE_qpyBFRo0rU91qd16ufR6xAYSvXj8UCRcunMOsF2tY7dqW91IJ-j_E0SH3N97GmJcMe3lMc3K-euQf78hYtafbZa18mpax-W5TwFA44dlbVZ9AQVQuO_e3Hay04ijfx7hYcKoBmuUbhRgnX50BjlkVpQLwEC-fe0MvGI5KGJHoeRGTEGQsIl_i8YfZGYk867oMLICHL_EjHcUx3c54yvhsxvYRmtazEFRBKc1HOaV5QKszccQvHLrt5YQnT7pa57bah_Wc31_-03cCJipLgmWw4t9Cs3z_EHRrburhXy_QFkqN-eg
link.rule.ids 230,309,786,891,25594,76903
linkProvider European Patent Office
linkToHtml http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwfV3dT8IwEL8gfuCbokb87IPZ2yKs29weiBn7YCjbGhgGnsg2SsLLIDLjv--tAvqiD02aNrlcm95dr_e7K8ADGoVZc84TmSuzpqxqpiaXNaDlsvzZbN7MFOUbIBvq_kh9GWvjCiy2uTCiTuinKI6IEpWhvBdCX69-HrEcga1cP6YLHFo-e3HbkbbesVnaS8nptF0WOZEt2Tb2pHDQxnuKgefVUvdg_wk9QuEpvXXKpJTVb4vincABQ2J5cQoVntehZm8_XqvDUbCJd9fhUAA0szUOboRwfQY0cGM_cogVYmPMGljxaEgij_i9rk-GzHUdwkp83iCekMAqHffuORDPjW1fRj6muzVPXbbjmF5ANV_m_BIIpQnP5jRJKeVqYpipoWetJNW4qreyRDcb0PiTzNU_c_dQ8-OgP-33wtdrOBYRE9TPinED1eL9g9-i4S3SO7FlX6FJgWQ
openUrl ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Apatent&rft.title=METHOD+AND+APPARATUS+OF+HIGH+SPEED+PROPERTY+MAPPING&rft.inventor=LOMBROZO%2C+PETER+M&rft.inventor=SU%2C+CHANMIN&rft.date=2009-10-28&rft.externalDBID=A4&rft.externalDocID=EP1938040A4