FABRICATION OF A FERROMAGNETIC INDUCTOR CORE AND CAPACITOR ELECTRODE IN A SINGLE PHOTO MASK STEP

• Main Authors: BRENNAN, KENNETH, D, RAO, SATYAVOLU, S., PAPA
• Format: Patent
• Language: English; French; German
• Published: 06.01.2010
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

An integrated circuit capacitor having a bottom plate 50 a, a dielectric layer 250 ', and a ferromagnetic top plate 20 a.