Method for removing organic electroluminescent residues from a substrate

• Main Authors: PLISHKA, MARTIN JAY, JOHNSON, ANDREW DAVID, ROGERS, STEVEN ARTHUR, DICKENSON, JOHN BARTRAM, MAROULIS, PETER JAMES, SISTERN, MARK IAN
• Format: Patent
• Language: English; French; German
• Published: 21.03.2007
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

Organic electroluminescent residues are removed from a substrate by reactive species generated by activation in a remote chamber of a process gas comprising a fluorine-containing gas.