DEVICE AND METHOD FOR SPUTTERING WITH THE AID OF A DISPLACEABLE PLANAR TARGET

The invention relates to a device for atomising material in a vacuum chamber with the aid of a displaceable target device (1) comprising a planar target (2) which can be switched as a cathode and which can be displaced on a plane. The inventive device comprises a stationary target environment (16),...

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Bibliographic Details
Main Authors HAUSWALD, RALF, FUKAREK, WOLFGANG, WILLKOMMEN, UDO
Format Patent
LanguageEnglish
French
German
Published 09.02.2011
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
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