Airtight container

• Main Author: KOMINAMI, SATOSHI
• Format: Patent
• Language: English; French; German
• Published: 25.10.2006
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

A space is largely defined inside of a lid 14, thus enhancing the freedom of a design of members to be contained inside of the lid 14. An airtight container 11 includes a container unit 12 which contains therein a plurality of semiconductor wafers W, the lid 14 which closes the container unit 12, an...